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Gases Name | Symbol | TLV/TWA | Range(s) |
---|---|---|---|
Acetic Acid | CH3COOH | 1.5 PPM | 30 PPM |
Ammonia | NH3 | 25 PPM | 75, 100, 200, 400, 1K PPM |
Ammonia | NH3 | 25 PPM | 1, 4 PPM |
Arsine | AsH3 | 0.05 PPM | 0.2 / 1.5 PPM |
Benzene | C6H6 | 0.5 PPM | various PPM |
Boron Trichloride | BCI3 | HCl C 5 PPM | 15 PPM |
Boron Trifluoride | BF3 | HF C 3PPM | 9 PPM |
Bromine | Br2 | 0.1 PPM | 1 PPM |
Butane | C4H10 | LEL = 1.9% | 100% LEL |
Carbon Dioxide PPM | CO2 | 5,000 PPM | 2k, 5k, 10k PPM |
Carbon Dioxide %Vol. | CO2 | 5,000 PPM | 1.5, 5, 20, 50, 60, 100% |
Carbon Monoxide | CO | 25 PPM | 30 / 75 / 150 PPM |
Carbon Monoxide | CO | 25 PPM | 300 / 500 PPM |
Carbon Monoxide H2 Compensated |
CO | 25 PPM | 2000 PPM |
Chlorine | Cl2 | 0.5 PPM | 3 / 10 / 20 PPM |
Chlorine Dioxide | ClO2 | 0.1 PPM | 1 / 5 PPM |
Chlorine Trifluoride | ClF3 | 0.1 PPM | 0.6 PPM |
Combustibles LEL | LEL | – | 100% LEL |
Combustibles PPM | PPM | – | various PPM |
Diborane | B2H6 | 0.1 PPM | 0.3 PPM |
Dimethylamine | DMA | 5 PPM | 15 PPM |
Dichlorosilane | DCS | HCl 5 PPM | 15 PPM |
Disilane | Si2H6 | 5 PPM | 15 PPM |
Fluorine | F2 | 1 PPM | 3 PPM |
Formaldehyde | HCHO | C 0.3 PPM | 1 / 10 / 500PPM |
Germane | GeH4 | 0.2 PPM | 0.2 / 0.8 PPM |
Halocarbons | HCFC | Various | 0 ~ 5,000 (typ) |
Hexane | C6H14 | – | 2,000 PPM |
Hexane | C6H14 | LEL = 1.1% | 100% LEL |
Hydrazine | N2H4 | 0.1 PPM | 4 PPM |
Hydrocarbon LEL | HC | – | 100% LEL |
Hydrocarbon PPM | HC | – | various PPM |
Hydrocarbon %Vol. | HC | – | 2 / 5 / 20 % Volume |
Hydrogen LEL | H2 | LEL = 4% | 100% LEL |
Hydrogen PPM | H2 | – | 4 / 10 / 2,000 PPM |
Hydrogen Bromide | HBr | C 3 ppm | 9 / 10 PPM |
Hydrogen Chloride | HCL | C 5 ppm | 10 / 15 / 30 PPM |
Hydrogen Cyanide | HCN | STEL C 4.7 PPM | 15 / 30 PPM |
Hydrogen Fluoride | HF | C 3 ppm | 9 / 10 PPM |
Hydrogen Iodide | HI | – | 5 PPM |
Hydrogen Peroxide | H2O2 | 1 PPM | 400 PPB / 3 PPM |
Hydrogen Selenide | H2Se | 0.05 PPM | 0.2 PPM |
Hydrogen Sulfide | H2S | 0.1 / 1 PPM | 1 / 30 PPM |
Hydrogen Sulfide | H2S | 1 PPM | 100 / 2K PPM |
Iodine | I2 | STEL C 0.01 ppm | 1 PPM |
Isobutane | C4H10 | LEL = 1.8% | 100% LEL |
Isopropyl Alcohol (IPA) | IPA | 400 PPM | 10 / 2K PPM |
Methane | CH4 | LEL = 5% | 100% LEL |
Nitric Acid | HNO3 | 2 PPM | 20 PPM |
Nitric Oxide | NO | 25 PPM | 100 PPM |
Nitrogen Dioxide | NO2 | 3 PPM | 9 / 15 / 20 PPM |
Nitrogen Monoxide | NO | 100 PPM | 1 PPM |
Nitrogen Tetraoxide | N2O4 | NO2 3 PPM | 15 PPM |
Nitrogen Trifluoride | NF3 | 10 PPM | 30 PPM |
Nitrous oxide | N2O | 50 PPM | 500 PPM |
Nitrous Tetraoxide | N2O4 | NO2 3 PPM | 15 PPM |
Nitrous Trifluoride | NF3 | 10 PPM | 30 PPM |
Octafluorocyclopentene | C5F8 | – | 5 PPM |
Oxygen | O2 | – | 25% / 40% |
Ozone | O3 | 0.1 PPM | 0.6 / 5 / 100 PPM |
Pentane | C5H12 | LEL = 1.5% | 100% LEL |
Perfluorobutadiene | C4F6 | – | 5 PPM |
Phosphine | PH3 | 0.3 PPM | 1 / 2 / 5 / 20 PPM |
Phosphorus Trifluoride | PF3 | 10 PPM | 0.1 PPM |
Propane | C3H8 | LEL = 2.1% | 10 PPM / 100% LEL |
Silane | SiH4 | 5 PPM | 0.5 / 15 PPM |
Silicon Tetrachloride | SICI4 | HCl C 5 ppm | 15 PPM |
Silicon Tetrafluoride | SiF4 | HF C 3 PPM | 9 PPM |
Sulfur Dioxide | SO2 | 0.25 PPM | 1/6/10/20/15/30 PPM |
Sulfur Tetrafluoride | SF4 | HF C 3 PPM | 9 PPM |
Tetraethyl Orthosilicate | TEOS | 10 PPM | 15 PPM |
Toluene | C6H5CH3 | 20 PPM | various PPM |
Trichlorosilane | TCS | HDl C 5 PPM | 15 PPM |
Trimethoxy Phosphate | TMP | 2 PPM | 15 PPM |
Trimethoxyboron | TMB | – | 500 PPM |
Tungsten Hexafluoride | WF6 | HF C 3 PPM | 9 PPM |
1 1 1-Trichloroethane | C2H3Cl3 | 350 PPM | 0 ~ 2,000 PPM |
Volatile Organic Compound | VOCs | – | 50 / 100 / 1K / 2K / 6K PPM |