Toray Engineering have been at the forefront of Zirconium Ceramic Oxygen Analyser design for over 30 years, and have developed the LC-300 for the application of controlling and monitoring in the electronics industry.
Toray’s long experience has culminated in the development of a unique, compact Zirconium ceramic sensor that is stable and provides highly accurate measurements over a wide range, from ultra-low concentrations to 100% oxygen concentration with a single device. It can perform for years with stable, reliable and precise measurement.
The LC-300TEL version has been adapted and customised for Tokyo Electron (TEL) equipment.
Toray Zirconia Oxygen Analysers determine oxygen concentration by using the conductivity of a Zirconium ceramic cell. Zirconium ceramic cells allow only oxygen ions to pass through at high temperatures. With reference gas on one side and sample gas on the other, oxygen ions move from the side with the highest concentration to that with the lowest concentration. This movement of ions generates an Electro Motive Force (EMF) which can be measured to determine oxygen content. This process is in accordance with the Nernst Equation.
LC-300TEL has all the features required to meet the users needs, and is easy to operate, has a compact console, and can be integrated into equipment to save space. It is ideal for control and monitoring application in the semiconductor industry, as well as for all types of experiments and research, process control for atmosphere treatment and baking.
Weatherall Equipment is the United Kingdom and European authorised sales and service agent for Toray Engineering Co Ltd Oxygen Analysers using Toray’s unique Zirconium Ceramic cells. For other international service locations please see Toray’s website.
|Type||Portable or Panel Mounted|
|Display||Digital 4-digit display, Atm; bar graph. (O2 concentration)|
|Measurement Range||0.1ppm~100%, 10-20 – 10-0 Atm.|
|Analog Range||0-1 / 10 / 100 / 1000ppm, 0-1 / 10 / 100%, 10-20 – 10-0 Atm
*Values less than 1 ppm are reference values (not guaranteed)
|Sampling Method||Continuous suction using a built-in pump|
|Flow Rate Display||Bar Graph 20~100 ml/min/10 divided|
|Supply Gas Rate||Approx. 1.5 L/min|
|Sensor Gas Rate||60 ±10 mL/min|
|Gas Connection||INLET (sample gas inlet): Rc1/8
BYPASS OUT: Rc1/8
SAMPLING OUT: Rc1/8
SENSOR IN: Rc1/8
|Reference Gas||Atmospheric Gas|
|Dimensions||Approx. 210(W) × 134(H) × 365(D) mm|
|Weight||Approx. 7 kg|
|Paint Colour||Munsell N3,Semi-Glossed (black)|
|Repeatability||Within ±1 % FS (full scale) (at 1% range or higher)
Within ±2 % FS (full scale) (at 1% range or lower)
(not guaranteed for the 0-1 ppm and Atm. range or below)
|Air point stability||Within ±1 % of full scale / 24 hours|
|External outputs||External output: DC 0-10 V|
|Range marker output||BCD, 3 Contact Outputs Capacity DC 24V, 0.3A|
|Communication output||RS-232C standard (unidirectional). Bit rate: 19200 / 9600 / 4800bps|
|Limit Alarm||LED Display (L, or LL). Contact output: 2 a, independently. Contact capacity AC30V, DC24V, 3A|
|Self-diagnosis functions||Warm-up Error, Overheat Error, Thermocouple Error, EEPROM and RAM Error, Air & Span Calibration Error, Furnace Error, O2 Sensor Resistance Error, O2 Sensor Irregular Potential Error, Sample Flow Error|
|Sample gas conditions||Must not contain flammable gas, halogen gas, silica, corrosive gases nor vapor. Pressure: Approx. 295 Pa required
Flow rate: 1,000-2,000 ml/min Humidity: Dew point lower than ambient temperature
|Power supply||Voltage: AC 100V ±10V Frequency 50/60Hz|
|Installation conditions||Indoors, Non-explosion-proof zone Ambient temperature: 0-40 °C Ambient humidity: 45-75 %RH, No condensation|
*The design and specifications may change without notice for improvement.