Zirconium Ceramic Oxygen Analyser

  • TORAY LC-300TEL zirconium oxygen analyser TORAY LC-300TEL zirconium oxygen analyser
  • TORAY LC-300TEL zirconium oxygen analyser flow diagram TORAY LC-300TEL zirconium oxygen analyser flow diagram
  • TORAY LC-300TEL zirconium oxygen analyser flow diagram TORAY LC-300TEL zirconium oxygen analyser flow diagram
LC-300TEL at a glance

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Toray Engineering have been at the forefront of Zirconium Ceramic Oxygen Analyser design for over 30 years, and have developed the LC-300 for the application of controlling and monitoring in the electronics industry.

Toray’s long experience has culminated in the development of a unique, compact Zirconium ceramic sensor that is stable and provides highly accurate measurements over a wide range, from ultra-low concentrations to 100% oxygen concentration with a single device. It can perform for years with stable, reliable and precise measurement.

The LC-300TEL version has been adapted and customised for Tokyo Electron (TEL) equipment.

Toray Zirconia Oxygen Analysers determine oxygen concentration by using the conductivity of a Zirconium ceramic cell. Zirconium ceramic cells allow only oxygen ions to pass through at high temperatures. With reference gas on one side and sample gas on the other, oxygen ions move from the side with the highest concentration to that with the lowest concentration. This movement of ions generates an Electro Motive Force (EMF) which can be measured to determine oxygen content. This process is in accordance with the Nernst Equation.

LC-300TEL has all the features required to meet the users needs, and is easy to operate, has a compact console, and can be integrated into equipment to save space. It is ideal for control and monitoring application in the semiconductor industry, as well as for all types of experiments and research,  process control for atmosphere treatment and baking.


Weatherall Equipment is the United Kingdom and European authorised sales and service agent for Toray Engineering Co Ltd Oxygen Analysers using Toray’s unique Zirconium Ceramic cells. For other international service locations please see Toray’s website.

  • Excellent Repeatability and Accuracy
    Toray’s unique, compact Zirconia sensor technology with special coating, results in years of extremely reliable, stable, and precise measurement.
  • Highly Durable Sensor
    The specially treated sensor results in unprecedented durability and reliability, leading to much longer sensor life and long-term stable precise measurements.
  • Super-Fast Response
    The LC-300TEL minimises the required volume of sample gas leading to very fast response time.
  • Wide measurement range
    Designed for monitoring oxygen content across a very wide range from ppm to 100% volume.
  • Compact design (portable or panel-mounted) and easy to operate
    Large display and function keys in a compact design make installation and operation simple.
  • Easy Sensor Replacement
    The sensor unit is designed for easy replacement.
  • Visual carbon filter check
    A bar graph display shows when the activated carbon filter needs replacing.
  • Two Oxygen concentration alarms L, LL
  • Gas flow error signal
  • CE Compliant
  • Electronics / Semiconductor Industry
  • Oxygen Control and Process Monitoring
  • Tokyo Electron (TEL) equipment
  • Experimental Research and Development
  • Process Control for atmosphere treatment and baking
Type Portable or Panel Mounted
Display Digital 4-digit display, Atm; bar graph. (O2 concentration)
Measurement Range 0.1ppm~100%, 10-20 – 10-0 Atm.
Analog Range 0-1 / 10 / 100 / 1000ppm, 0-1 / 10 / 100%, 10-20 – 10-0 Atm
*Values less than 1 ppm are reference values (not guaranteed)
Sampling Method Continuous suction using a built-in pump
Flow Rate Display Bar Graph 20~100 ml/min/10 divided
Supply Gas Rate Approx. 1.5 L/min
Sensor Gas Rate  60 ±10 mL/min
Gas Connection INLET (sample gas inlet): Rc1/8
Reference Gas Atmospheric Gas
Dimensions Approx. 210(W) × 134(H) × 365(D) mm
Weight Approx. 7 kg
Paint Colour Munsell N3,Semi-Glossed (black)
Repeatability Within ±1 % FS (full scale) (at 1% range or higher)
Within ±2 % FS (full scale) (at 1% range or lower)
(not guaranteed for the 0-1 ppm and Atm. range or below)
Air point stability Within ±1 % of full scale / 24 hours
External outputs External output: DC 0-10 V
Range marker output BCD, 3 Contact Outputs Capacity DC 24V, 0.3A
Communication output RS-232C standard (unidirectional). Bit rate: 19200 / 9600 / 4800bps
Limit Alarm LED Display (L, or LL). Contact output: 2 a, independently. Contact capacity AC30V, DC24V, 3A
Self-diagnosis functions Warm-up Error, Overheat Error, Thermocouple Error, EEPROM and RAM Error, Air & Span Calibration Error, Furnace Error, O2 Sensor Resistance Error, O2 Sensor Irregular Potential Error, Sample Flow Error
Sample gas conditions Must not contain flammable gas, halogen gas, silica, corrosive gases nor vapor. Pressure: Approx. 295 Pa required
Flow rate: 1,000-2,000 ml/min Humidity: Dew point lower than ambient temperature
Power supply Voltage: AC 100V ±10V Frequency 50/60Hz
Installation conditions Indoors, Non-explosion-proof zone Ambient temperature: 0-40 °C Ambient humidity: 45-75 %RH, No condensation

*The design and specifications may change without notice for improvement.